mag.x 125宽场显微镜系统
The Optem® mag.x system 125 represents a new class of optical systems that enable microscope-like resolution with wide fields-of-view supporting modern high-resolution sensors up to 57 mm diameter. The variable system is fully modular and ideally suited for submicron imaging in inspection and measurement applications. The modular approach enables adaptation of the system to many applications ranging from a straightforward optical system without illumination to a full featured system including coaxial illumination and closed loop autofocus.
宽视场高分辨率成像

With integrable autofocus modules, the mag.x system 125 meets the most demanding inspection tasks in automated industrial environments. Various inspection applications benefit from the "closed-loop" autofocus solution by reducing cycle times and increasing overall throughput.
High resolution inspection is being used in many applications. Each application has its own requirements and constraints. In order to cater for all these diverse needs, the mag.x system 125 is as modular as they come. Integration of customized elements is easy and enables a system that integrates seamlessly into the surrounding equipment. The mag.x 125 system can be combined with our range of objective lenses, tube lenses, illumination tubes, autofocus modules, mounting plates and other accessories to meet your application needs.
Our Quality Criteria:
- 采用创新光学设计的精密工程
- 物体和图像侧的确切远心度
- 衍射限制了整个成像圈的光学性能
- 精确动态自动对焦
理想应用:
Inspection and processing of semiconductors, flat-panel displays (TFT and OLED) and printed circuit boards (PCBs), micro measurement and metrology, MEMS and nanotechnology, fluorescence microscopy, digital pathology, and more.
| Objective Lens - Plan Apochromat | 镜筒透镜系统 | |||||||||||||||
| Mtub : 1x | Mtub : 2.25x | |||||||||||||||
| f'tub : 250 mm | f'tub : 563 mm | |||||||||||||||
| 2y' : 25 mm | 2y' : 56.3 mm | |||||||||||||||
| Magn./NA | WD | f'obj. | δ obj | R0 | M | 2y | NA' | R'0 | M | 2y | NA' | R'0 | ||||
| 毫米 | 毫米 | µm | lp/mm | 毫米 | lp/mm | 毫米 | lp/mm | |||||||||
| 2x/0.08 | 24 | 125.0 | ± 42.7 | 293 | 2.0 | 12.5 | 0.04 | 147 | 4.5 | 12.5 | 0.018 | 65 | ||||
| 5x/0.20 | 13 | 50.0 | ± 6.8 | 733 | 5.0 | 5.0 | 0.04 | 147 | 11.25 | 5.0 | 0.018 | 65 | ||||
| 8x/0.32 | 23 | 31.3 | ± 2.7 | 1172 | 8.0 | 3.1 | 0.04 | 147 | 18.0 | 3.1 | 0.018 | 65 | ||||
NA Numerical aperture in the object space; NA=n * sin (σ)
WD Working distance
f'obj Focal length of the objective lense
f'tub 镜筒透镜的焦距
δobj Depth of field at 546 nm; δobj = ± n * λ/(2*NA2)
R0 Cut off frequency in object space at 546 nm; R0 = (2*NA) / λ
R0' Cut off frequency in image space at 546 nm; R0' = R0 /M
2y' Image field size (maximum detector diagonal)
2y Object field size
M Magnification of the overall system; M = Mobj * Mtub
| Objective Lens - Plan Apochromat | 镜筒透镜系统 | |||||||||||||||
| Mtub : 1x | Mtub : 2.25x | |||||||||||||||
| f'tub : 250 mm | f'tub : 563 mm | |||||||||||||||
| 2y' : 25 mm | 2y' : 56.3 mm | |||||||||||||||
| Magn./NA | WD | f'obj. | δ obj | R0 | M | 2y | NA' | R'0 | M | 2y | NA' | R'0 | ||||
| 毫米 | 毫米 | µm | lp/mm | 毫米 | lp/mm | 毫米 | lp/mm | |||||||||
| 2x/0.08 | 24 | 125.0 | ± 42.7 | 293 | 2.0 | 12.5 | 0.04 | 147 | 4.5 | 12.5 | 0.018 | 65 | ||||
| 5x/0.20 | 13 | 50.0 | ± 6.8 | 733 | 5.0 | 5.0 | 0.04 | 147 | 11.25 | 5.0 | 0.018 | 65 | ||||
| 8x/0.32 | 23 | 31.3 | ± 2.7 | 1172 | 8.0 | 3.1 | 0.04 | 147 | 18.0 | 3.1 | 0.018 | 65 | ||||