mag.x 125 Widefield Microscope System
The Optem® mag.x system 125 represents a new class of optical systems that enable microscope-like resolution with wide fields-of-view supporting modern high-resolution sensors up to 57 mm diameter. The variable system is fully modular and ideally suited for submicron imaging in inspection and measurement applications. The modular approach enables adaptation of the system to many applications ranging from a straightforward optical system without illumination to a full featured system including coaxial illumination and closed loop autofocus.
High-resolution imaging across a wide field-of-view
With integrable autofocus modules, the mag.x system 125 meets the most demanding inspection tasks in automated industrial environments. Various inspection applications benefit from the "closed-loop" autofocus solution by reducing cycle times and increasing overall throughput.
High resolution inspection is being used in many applications. Each application has its own requirements and constraints. In order to cater for all these diverse needs, the mag.x system 125 is as modular as they come. Integration of customized elements is easy and enables a system that integrates seamlessly into the surrounding equipment. The mag.x 125 system can be combined with our range of objective lenses, tube lenses, illumination tubes, autofocus modules, mounting plates and other accessories to meet your application needs.
Our Quality Criteria:
- Precision engineering with innovative optical design
- Exact telecentricity on object and image side
- Diffraction limited optical performance over complete image circle
- Precise and dynamic autofocus
Ideal Applications:
Inspection and processing of semiconductors, flat-panel displays (TFT and OLED) and printed circuit boards (PCBs), micro measurement and metrology, MEMS and nanotechnology, fluorescence microscopy, digital pathology, and more.
| Objective Plan Apochromat | Tube Lens System | |||||||||||||||
| 1x | 2.25x | |||||||||||||||
| f'tub = 250 mm | f'tub = 563 mm | |||||||||||||||
| 2y' = 25 mm | 2y' = 57 mm | |||||||||||||||
| WD | f'obj | δ | R0 | M | 2y mm | NA' | R'0 lp/mm | M | 2y mm | NA' | R'0 lp/mm | |||||
| Magn./NA | mm | mm | µm | lp/mm | ||||||||||||
| 2x/0.08 | 24.8 | 125 | ± 42.7 | 293 | 2.0 | 12.5 | 0.04 | 147 | 4.5 | 12.5 | 0.018 | 65 | ||||
| 5x/0.2 | 13.0 | 50 | ± 6.8 | 733 | 5.0 | 5.0 | 0.04 | 147 | 11.25 | 5.0 | 0.018 | 65 | ||||
NA Numerical aperture in the object space = n · sin (σ)
WD Working distance
f'objFocal length of the objective
f'tubFocal length of the tube lens
δobjDepth of field at 546 nm δobj= ±n · λ/(2 · NA2)
R'0Cut-off frequency in image space at 546 nm
R0Cut-off frequency in object space at 546 nm; R0 = (2 · NA) / λ
2y' Image field size (maximum detector diagonal)
2y Object field size
M Magnification of the overall system; M = Mobj · Mtub
| Objective Plan Apochromat | Tube Lens System | |||||||||||||||
| 1x | 2.25x | |||||||||||||||
| f'tub = 250 mm | f'tub = 563 mm | |||||||||||||||
| 2y' = 25 mm | 2y' = 57 mm | |||||||||||||||
| WD | f'obj | δ | R0 | M | 2y mm | NA' | R'0 lp/mm | M | 2y mm | NA' | R'0 lp/mm | |||||
| Magn./NA | mm | mm | µm | lp/mm | ||||||||||||
| 2x/0.08 | 24.8 | 125 | ± 42.7 | 293 | 2.0 | 12.5 | 0.04 | 147 | 4.5 | 12.5 | 0.018 | 65 | ||||
| 5x/0.2 | 13.0 | 50 | ± 6.8 | 733 | 5.0 | 5.0 | 0.04 | 147 | 11.25 | 5.0 | 0.018 | 65 | ||||